|  | | | ξ ͻ / =ξ | | ͻŹ | | IT ұ ߰ξ(ǥ ) ͻ 3Ϲݻ ġ ͻ ֱ ذ Ϸϰ 꿡 Ѵٰ .
߰ξ ͻ ߰ξ 迭 Űڿ Բ 500 Ǹ .
ռ ξ 2018 6 ͻÿ 12 ذ(MOU) ü , ù ° ڷ 1 1000 Ը, 13 ǹ Ǹ .
3 1⸸ 簡 Ϸƴ.
߰ξ ͻ 3 125344 2022 ܰ 1800 Ѵٴ ȹ̾ 350 â ȿ Ȱȭ ȴ.
|  | | | ߰߱ ߰ξ ͻ 3Ϲݻ о 6 5 ͻû ߰ξ ּ (ʼ °) ȴ. | | ͻŹ | | ͻ忡 ䷹Ʈ(Photoresist, PR) ϴ ֿ (PAC, Photo Active Compound) DNQ(Diazonaphthoquinone), ֿ ϰ ȴ.
PAC Űڰ, DNQ ξ Ѵ. Ը PAC 250, DNQ 300 ̴.
ҡΡ ȭ ٽ '䷹Ʈ ' Ը Ȯ, ǰ 뷮 Ŀ . ̸ Ȯ ̴.
ξ ䷹Ʈ ٽ 30% ˷.
, ü ý ȭ ȿ ǰ ϴٴ ̴.
ξ ǥ "ͻ ذ ݵü ÷̿ ü ܰ ִ ְ ƴ" .
ǥ " 3 ؼ ܰ ڸ ȭӸ ƴ϶ Ȱȭ â 弭ڴ" ٿ.
ξ ͻ ذ ̴ 13Ϸ ڷγ 19ķ ϱ ߴ./ȫ
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